We represent established and emerging companies in all phases of the semiconductor industry including processing, packaging, fabrication and test equipment. In particular, our practitioners are experienced in the areas of wire bond and BGA packaging, plasma etch, cleaning and deposition, photolithography equipment, mask/etch and damascene processing and optical test equipment, among others.

Representative Clients:

National Semiconductor, LSI Logic, Lam Research, KLA-Tencor, Nikon Research Corp.

Representative Patents:

ClientPatent NumberTitle
LSI Logic5,926,720Consistent Alignment Mark Profiles on Semiconductor Wafers Using PVD Shadowing
LSI Logic5,994,211Method and Composition for Reducing Gate Oxide Damage During RF Sputter Clean
National Semiconductor5,789,809Thermally Enhanced Micro-Ball Grid Array Package
Lam Research Corporation5,933,314Method and Apparatus for Offsetting Plasma Bias Voltage in Bipolar Electro-Static Chucks
National Semiconductor Corp6,664,615Method and Apparatus for Leadframe Based Grid Array IC Packaging
National Semiconductor Corp7,095,116Aluminum-Free Under Bump Metallization Structure
National Semiconductor Corp7,230,580Design of a Two Interconnect IC Chip for a Radio Frequency Identification Tag and Method for Manufacturing Same
National Semiconductor Corp7,247,209Dual Outlet Nozzle for the Combined Edge Bead Removal and Backside Wash of Spin Coated Wafers